JPS6037774A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6037774A
JPS6037774A JP58147524A JP14752483A JPS6037774A JP S6037774 A JPS6037774 A JP S6037774A JP 58147524 A JP58147524 A JP 58147524A JP 14752483 A JP14752483 A JP 14752483A JP S6037774 A JPS6037774 A JP S6037774A
Authority
JP
Japan
Prior art keywords
layer
film
forming
silicon film
collector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58147524A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0420263B2 (en]
Inventor
Tadashi Hirao
正 平尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP58147524A priority Critical patent/JPS6037774A/ja
Publication of JPS6037774A publication Critical patent/JPS6037774A/ja
Publication of JPH0420263B2 publication Critical patent/JPH0420263B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/30—Devices controlled by electric currents or voltages
    • H10D48/32—Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H10D48/34—Bipolar devices
    • H10D48/345—Bipolar transistors having ohmic electrodes on emitter-like, base-like, and collector-like regions

Landscapes

  • Bipolar Transistors (AREA)
JP58147524A 1983-08-10 1983-08-10 半導体装置の製造方法 Granted JPS6037774A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58147524A JPS6037774A (ja) 1983-08-10 1983-08-10 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58147524A JPS6037774A (ja) 1983-08-10 1983-08-10 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6037774A true JPS6037774A (ja) 1985-02-27
JPH0420263B2 JPH0420263B2 (en]) 1992-04-02

Family

ID=15432260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58147524A Granted JPS6037774A (ja) 1983-08-10 1983-08-10 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6037774A (en])

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63114261A (ja) * 1986-09-11 1988-05-19 フェアチャイルド　セミコンダクタ　コーポレーション トランジスタ用の自己整合型ベース分路
JPS63236347A (ja) * 1987-03-24 1988-10-03 Nec Corp 半導体装置の製造方法
JPH0223649A (ja) * 1988-07-12 1990-01-25 Seiko Epson Corp 半導体装置及びその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5563821A (en) * 1978-11-06 1980-05-14 Nec Corp Semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5563821A (en) * 1978-11-06 1980-05-14 Nec Corp Semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63114261A (ja) * 1986-09-11 1988-05-19 フェアチャイルド　セミコンダクタ　コーポレーション トランジスタ用の自己整合型ベース分路
JPS63236347A (ja) * 1987-03-24 1988-10-03 Nec Corp 半導体装置の製造方法
JPH0223649A (ja) * 1988-07-12 1990-01-25 Seiko Epson Corp 半導体装置及びその製造方法

Also Published As

Publication number Publication date
JPH0420263B2 (en]) 1992-04-02

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